JPH0325401Y2 - - Google Patents

Info

Publication number
JPH0325401Y2
JPH0325401Y2 JP1985121691U JP12169185U JPH0325401Y2 JP H0325401 Y2 JPH0325401 Y2 JP H0325401Y2 JP 1985121691 U JP1985121691 U JP 1985121691U JP 12169185 U JP12169185 U JP 12169185U JP H0325401 Y2 JPH0325401 Y2 JP H0325401Y2
Authority
JP
Japan
Prior art keywords
shutter
molecular beam
film
view
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985121691U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6230333U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985121691U priority Critical patent/JPH0325401Y2/ja
Publication of JPS6230333U publication Critical patent/JPS6230333U/ja
Application granted granted Critical
Publication of JPH0325401Y2 publication Critical patent/JPH0325401Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985121691U 1985-08-08 1985-08-08 Expired JPH0325401Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985121691U JPH0325401Y2 (en]) 1985-08-08 1985-08-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985121691U JPH0325401Y2 (en]) 1985-08-08 1985-08-08

Publications (2)

Publication Number Publication Date
JPS6230333U JPS6230333U (en]) 1987-02-24
JPH0325401Y2 true JPH0325401Y2 (en]) 1991-06-03

Family

ID=31011195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985121691U Expired JPH0325401Y2 (en]) 1985-08-08 1985-08-08

Country Status (1)

Country Link
JP (1) JPH0325401Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2450896A1 (de) * 1973-10-30 1975-05-07 Gen Electric Halbleitervorrichtungen und temperaturgradienten-zonenschmelzverfahren zur herstellung derselben

Also Published As

Publication number Publication date
JPS6230333U (en]) 1987-02-24

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